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原位直接氮化法制备片状AlN粉体
Preparation of Flake-like AlN Powder by the In-situ Direct Nitridation Route
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- DOI:
- 作者:
- 庞皓然,李 康,赵 蕾,魏智磊,史忠旗
PANG Haoran, LI Kang, ZHAO Lei, WEI Zhilei, SHI Zhongqi
- 作者单位:
- 西安交通大学 材料科学与工程学院,金属材料强度国家重点实验室,陕西 西安 710049
State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
- 关键词:
- 氮化铝粉体;直接氮化法;填料;粉体形貌
AlN powder; direct nitridation; filler; powder morphology
- 摘要:
- 片状 AlN 粉体作为热界面材料的填料应用前景广阔,但制备工艺难度大、成本高限制了其实际应用。 本文以球磨处理后得到的片状 Al 粉为铝源, 在氮气气氛中通过原位直接氮化法成功制备出由等轴状微米颗粒结合而成的片状 AlN 粉体,并研究了球磨处理、氮化温度和升温速率对产物物相组成及显微形貌的影响。 结果表明,球磨处理可增强 Al 粉的反应活性、提升氮化速率。 升高氮化温度可提升 Al 粉的氮化率,但过高的氮化温度则会导致产物无法保持片状形貌;提高升温速率会增大等轴状微米颗粒的粒径。 当氮化温度为 640 ℃ 、升温速率为 5 ℃/min 时,制备的片状 AlN粉体表面最为致密、平整,有望作为热界面材料的填料使用。Flake-like AlN powder has broad application prospects as a filler for thermal interface materials (TIMs). However, the difficulty of preparation technology and high cost limit its practical application. In this work, flake-like AlN powder composed of equiaxed micro-particles was successfully prepared by in-situ direct nitridation in nitrogen atmosphere using flake-like Al powder obtained by ball milling as the Al source. The effects of the ball milling process, nitriding temperature and heating rate on the phase composition and microstructure of the products were studied. The results show that the ball milling process can enhance the reaction activity and nitridation rate of Al powder. Increasing the nitriding temperature can improve the nitriding rate of Al powder, but excessive nitriding temperature leads to the inability to maintain the flake-like morphology of the raw material. In addition, increasing the heating rate results in an increase in the particle size of equiaxed micron-particles. When the nitriding temperature is 640 ℃ and the heating rate is 5 ℃/min, the surface of the prepared flake-like AlN powder is compact and smooth, which is expected to be used as a two-dimensional inorganic filler for TIMs.