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因瓦合金超光滑表面加工的研究
Research on Super-smooth Surface Processing of Invar Alloys
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- DOI:
- 作者:
- 王 婉 1 ，王志军 1 ，马晓康 1 ，周 青 1 ，许 泉 2 ，王永杰 3 ，傅建明 2
WANG Wan1 , WANG Zhijun1 , MA Xiaokang1 , ZHOU Qing1 , XU Quan2 , WANG Yongjie3 , FU Jianming2
- 作者单位:
- 1. 西北工业大学 凝固技术国家重点实验室，陕西 西安 710072；2. 上海机电工程研究所，上海 201109；3. 中国科学院 西安光学精密机械研究所，陕西 西安 710119
1. State Key Laboratory of Solidification Processing , Northwestern Polytechnical University , Xi'an 710072 , China ; 2. Shanghai Institute of Mechanical and Electrical Engineering, Shanghai 201109, China; 3. Xi'an Institute of Optics and Fine Mechanics of CAS, Xi'an 710119, China
- 关键词:
- 因瓦合金；抛光；精密加工；表面形貌；表面粗糙度
Invar alloy; polishing; precise machining; surface topography; surface roughness
- 摘要:
- 为了实现因瓦合金高质量表面的超精密加工，提高因瓦合金的抛光质量，基于多层级纳米抛光技术对因瓦
合金进行了表面质量研究。 通过不锈钢抛光盘和自动抛光机对因瓦合金进行粗磨、细磨、粗抛和细抛，并采用光学轮廓
仪、三维轮廓仪、残余应力测试仪和 X 射线光电子能谱仪(XPS)对 4 个抛光阶段下因瓦合金的表面形貌、表面粗糙度、残
余应力和表面化学状态等方面进行分析，进一步探究因瓦合金逐级加工过程中的表面组分及状态。 结果表明，逐级加工
可以将因瓦合金的表面粗糙度降至 5 nm 以下，大幅度提高工件表面质量，实现合金表面超光滑状态。抛光过程中
工 件 表面的残余应力主要为压应力，且残余应力随着抛光精度的提升逐渐降低，但切应力始终维持在一个较低的
水平。 X 射线光电子能谱分析结果表明，抛光后工件表面部分 Ni 和 Fe 原子以+2 价的氧化状态存在，占所有原子
数的 21.86%左右。 通过多层级抛光技术实现了 5 nm 以内的表面粗糙度，对因瓦合金超精密加工工艺和提高成品质量
具有重要的意义。
In order to achieve ultra-precise machining of high-quality surfaces and improve the polishing quality of Invar alloys, a surface quality study based on multistage polishing technology was conducted. Four polishing states, including coarse grinding, fine grinding, and coarse and fine polishing, were attained by stainless steel polishing disc and automatic polishing machine. The surface morphology, surface roughness, residual stress and surface chemical state of the Invar alloy in each stage were analysed using an optical profilometer, surface 3D profiler, residual stress detector and X-ray photoelectron spectroscopy. The surface components and states during the machining process were further investigated. The results show that the surface roughness of the alloy can be reduced to less than 5 nm, and the surface quality of the workpiece can be greatly improved to achieve a super-smooth surface. The results of X-ray photoelectron spectroscopy show that some Ni and Fe atoms exist in the oxidation state of +2 valence on the surface after polishing, accounting for appximately 21.86% of all atoms. Surface roughness within 5 nm is achieved by multilevel polishing technology, which is of great significance for the ultra-precision machining process of Invar alloys and the improvement of finished product quality.