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因瓦合金超光滑表面加工的研究
Research on Super-smooth Surface Processing of the Invar Alloy
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- DOI:
- 作者:
- 王婉1,王志军1,马晓康1,周青1,许泉2,王永杰3,傅建明2
WANG Wan1, WANG Zhijun , MA Xiaokang1, ZHOU Qing1,
- 作者单位:
- 1. 西北工业大学 材料学院 先进润滑与密封材料研究中心,西安 710072;2.上海机电工程研究所,上海 201109;3.中国科学院西安光学精密机械研究所,西安,710119
1. School of Materials Science and Engineering, Northwestern Polytechnical University, Center of Advanced Lubrication and Seal Materials, Xi’an 710072; 2. Shanghai Institute of Mechanical and Electrical Engineering, Shanghai 201109; 3. Xi'an Institute of Optics and Fine Mechanics of CAS, Xi'an, 710119
- 关键词:
- 因瓦合金;抛光;精密加工;表面形貌;表面粗糙度
Invar alloy; polishing; precise machining; surface topography; surface roughness
- 摘要:
- 为了实现因瓦合金高质量表面的超精密加工,提高因瓦合金的抛光质量,基于多层级纳米抛光技术对因瓦合金进行了表面质量研究。通过不锈钢抛光盘和自动抛光机对因瓦合金进行了粗磨、细磨、粗抛和细抛,并采用光学轮廓仪、三维轮廓仪、残余应力测试仪和X 射线光电子能谱仪(XPS)对四个抛光阶段下因瓦合金的表面形貌、表面粗糙度、残余应力和表面化学状态等方面的分析,进一步探究因瓦合金逐级加工过程中的表面组分及状态。结果表明,逐级加工可以将因瓦合金的表面粗糙度降至5 nm以下,大幅度提高工件表面质量,实现合金表面超光滑状态;抛光过程中工件表面的残余应力主要为压应力,且残余应力随着抛光精度的提升逐渐降低,但切应力始终维持在一个较小的水平;X射线光电子能谱分析结果表明抛光后工件表面部分Ni和Fe原子以+2价的氧化状态存在,占所有原子数的21.86%左右。通过多层级抛光技术实现了5 nm以内的表面粗糙度,对因瓦合金超精密加工工艺和提高成品质量具有重要的意义。
In order to achieve ultra-precise machining of high-quality surface and improve the polishing quality of the Invar alloy, a surface quality study based on multi-stage polishing technology was conducted. The surface morphology, surface roughness, residual stress and surface chemical state of the Invar alloy under four polishing stages were analyzed by stainless steel polishing disc and automatic polishing machine. The surface components and states during the machining process were further investigated. The results show that the surface roughness of the alloy can be reduced to less than 5 nm, and the surface quality of the workpiece can be greatly improved to achieve a super-smooth surface. The results of X-ray photoelectron spectroscopy show that some Ni and Fe atoms exist in the oxidation state of +2 valence on the surface after polishing, accounting for about 21.86% of all atoms. The surface roughness within 5 nm is achieved by multi-level polishing technology, which is of great significance for the ultra-precision machining process of the Invar alloy and the improvement of finished product quality.