Research Progress on the Effect of Sintering Additives on the Thermal Conductivity and Mechanical Properties of Si3 N4 Ceramics
Author of the article:DENGKang, HUJiabin, HU Desheng, WEI Zhilei, SHI Zhongqi
Author's Workplace:State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
Key Words: silicon nitride; sintering aid; thermal conductivity; mechanical properties; sintering
Abstract:
The ongoing evolution of power semiconductor devices toward higher power density, increased switching
frequencies, and enhanced integration has introduced critical thermal management challenges, severely compromising their
operational stability and long-term reliability. Silicon nitride (Si3
N4
) ceramics, which are distinguished by exceptional
thermal conductivity, superior mechanical performance, and a coefficient of thermal expansion (CTE) that is compatible
with third-generation semiconductors, have emerged as ideal candidates for high-performance ceramic substrates. The
composition and corresponding ratios of sintering additives strongly affect both the sintering process and final properties,
making the selection of optimal additives a difficult challenge in realizing Si3
N4
ceramics with excellent heat conduction
and robust mechanical reliability. This review systematically summarizes the current research progress in oxide and
nonoxide sintering additive systems for the comprehensive fabrication of high-performance Si3
N4
ceramics and analyses the
mechanisms by which various additive systems tailor the densification process, microstructure evolution, thermal
conductivity and mechanical properties. Moreover, it forecasts future development trends and research directions for
sintering aid systems for Si3
N4
ceramics with high thermal conductivity and high strength.